Labels:text | screenshot | diagram | plan OCR: Automated Wafer Environment Control System ( AUTOWEC ) Environmental Operator Chamber Enclosure Dispatch Station SMIF Handling Arm Robot SMIF - BOX Electronic Shipping Lot Track - Transport - System Tracking Active Station BOX Single Work Cell Vertical Controller Wafer Transport Wafer Station System Cassette Flat Finder System Buffer Inspection N2 - Batch Clean Transfer Chamber Vacuum Machine CLO,1Z Tunnels Cluster Cost Filter Fan Unit PWP - warranty Cl. 1000 Cleanroom MEISSNER+WURST Benefit Analysis
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