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- Path: sparky!uunet!mcsun!uknet!comlab.ox.ac.uk!oxuniv!atmdcc
- From: atmdcc@vax.oxford.ac.uk
- Newsgroups: sci.engr
- Subject: Ohmic contacts to n-type silicon
- Message-ID: <1992Sep7.153050.8702@vax.oxford.ac.uk>
- Date: 7 Sep 92 14:30:50 GMT
- Organization: Oxford University VAX 6620
- Lines: 19
-
- Does anyone know of a good method of making an ohmic contact to n-type silicon?
-
- What I'm looking for is a simple evaporation/ sputtering technique to deposit a
- metal or alloy down onto the silicon which avoids the unnecessary complication
- of having to selectively dope a particular region. The metal-semiconductor
- should not form a diode and the metal should adhere properly.
-
- I've looked at some literature and whilst there's plenty of theoretical info
- about energy bands, Fermi levels, and so on, there's scant detail of what you
- do in practice.
- --
- ................................................................................
- David Catling [Tel:+44 865 272927 Fax:+44 865 272923]
- University of Oxford, Atmospheric, Oceanic and Planetary Physics,
- Clarendon Laboratory, Parks Road, Oxford OX1 3PU, United Kingdom.
- Preferred Email: catling@atm.ox.ac.uk (janet)
- catling@isams.dnet.nasa.gov (internet)
- My Law of Optimism:"The sooner you fall behind, The more time to catch up"
- ................................................................................
-