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- Newsgroups: comp.lsi
- Path: sparky!uunet!stanford.edu!leland.Stanford.EDU!sirius!rgupta
- From: rgupta@sirius.Stanford.EDU (Rajesh K. Gupta)
- Subject: Re: Question regarding probe pads
- Message-ID: <1992Sep4.171306.26970@leland.Stanford.EDU>
- Keywords: probe pads
- Sender: news@leland.Stanford.EDU (Mr News)
- Reply-To: rgupta@sirius.Stanford.EDU (Rajesh K. Gupta)
- Organization: Stanford University
- References: <tapas.715573218@femto.engr.mun.ca>
- Date: Fri, 4 Sep 92 17:13:06 GMT
- Lines: 28
-
- > Some points about landing probe pads inside a design chip seems to
- be unclear to me.
- > Hope some kind soul would be able to help me out.
- >
- > Say I want to probe a point in the circuit, which is a point inside
- a standard cell.
- > Since standard cells are designed very compact - I have the following
- question. Is the
- > standard practice is of landing probe pads inside standard cell, or
- that of taking a
- > metal(?) wire out from the point and placing the probe point at a
- convenient point
- > outside standard cells.
- >
-
-
- typically a picoprobe can be safely manipulated for
- distances in ten's of microns (a 20x20 u pad would be
- enough).
-
- However, most common practice today is to use voltage-contrast
- enhancement techniques on ebeam reflections. A 5x5 pad in topmost
- metal layer would be sufficient. If surrounded by a ground line, it
- would be even better. Of course, the tester would cost more.
-
-
- Rajesh
- 725-1776 CSL Modulars I rgupta@sirius.stanford.edu
-