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README
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1988-01-28
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The values you can set in the cif command file are :
stage_max - the maximum x/y coordinate (an integer)
stage_min - the minimum x/y coordinate (an integer)
aperture_min - the minimum aperture width (an integer)
aperture_max - the maximum aperture width (an integer)
grid_size - the size of grid the geometry is to be rounded to.
- This should be the larger of the aperture resolution
- and TWICE the x/y resolution (an integer)
convert_factor - One pattern generator unit in Cif-units
- (a Cif-unit is .01 microns) (a fixed point number)
If you wish to change the defaults for the MetricMann3000,
you would build a command file like:
scale 4
NM
NP
NG
aperture_min 1
aperture_max 400000
stage_min 1
grid_size 1