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Session:

10E - NIST Measurement Capabilities 

Date & Time:

Thursday August 10, 10:45 AM - 12:15 PM

Paper Title:

Calibration of Vacuum Gauges in the Range 13 Pa to 133 kPa (0.1 torr to 1000 torr) using Resonant Silicon Gauges as Transfer Standards 

 

 

Speaker:

Dr. Jay Hendricks  

CoAuthors:

Patrick Abbott 

Speaker Info

Company:

NIST

Department:

Pressure and Vacuum Group

Address:

100 Bureau Drive , Stop 8364
Gaithersburg, MD, 20899-8364, United States

Phone:

301-975-4836

Fax:

301-208-6962

Email:

jay.hendricks@nist.gov 

 

 

Abstract:

Many industrial processes rely on accurate pressure measurement in the range of 13 Pa to 133 kPa (0.1 to 1000 torr). The most commonly used gauges for measuring pressures in this range are capacitance diaphragm gauges (CDG's) and thermal conductivity gauges (TCG's) of several different designs including thermocouple and Pirani gauges. Calibration of these gauges is usually accomplished using one or more calibrated CDG's. However, these "transfer standard" CDG's must be calibrated themselves about once per year owing to the limitation on their stability. A relatively recent type of pressure transducer based on the resonance frequency of a micro-machined, 3-dimensional element has proved to have superior long-term stability compared with CDG's. In the recent CCM Key comparisons[1,2] of international pressure standards of absolute and differential pressure up to 1 kPa (7.5 torr), the resonance silicon gauge (RSG) technology provided superior long-term calibration stability. In this paper, it is shown how a simple ?transfer standard package? based on RSG's may be assembled for the purpose of calibrating vacuum gauges between 13 Pa and 133 kPa (0.1 torr to 1000 torr). The advantages of this system are much better uncertainty and long-term stability when compared with similar CDG-based transfer standards. Calibration data is shown for the calibration of common gauges against the RSG transfer standard package. 1. Miiller, A. P., Bergoglio, M., Bignell, N., Fen, K. M. K., Hong, S. S., Jousten, K., Mohan, P., Redgrave, F. J., and Sardi, M., Final Report on key comparison CCM.P-K4 of absolute pressure standards from 1 Pa to 1000 Pa, Metrologia, 2002, 39, Tech.Suppl., 07001. 2. Miiller, A.P., Cignolo, G. Fitzgerald, M. P., and Perkin, M. P., Final report on key comparison CCM.P-K5 of differential pressure standards from 1 Pa to 1000 Pa, Metrologia, 2002, 39, Tech. Suppl., 07002.  

 

 

 

 

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