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View Paper |
Session Topic: 2C, Pressure Session |
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Paper Title: A Force Balanced Piston Gauge for Very Low Gauge and Absolute Pressure |
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Date & Time: MONDAY, August 5, 2002 |
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2:30pm - 4:00pm
PARALLEL SESSIONS - SESSION 2 |
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Speaker: Martin Girard
DH Instruments, Inc. |
Email: MGirard@dhinstruments.com |
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A new piston gauge covers the range of gauge and absolute pressure from less than 10 Pa to 15 kPa. The instrument uses a mass comparator to measure the force resulting from differential pressure across a piston in a close fitting cylinder. Independent high and low pressure chambers allow true differential operation. In absolute mode, reference vacuum of less than 0.05 Pa is maintained. A novel piston centering system avoids rotation of the piston by using the flow of an independent pressure through a micron size, conical piston-cylinder gap to center the piston in the cylinder without rotation. The instrument is calibrated fundamentally in terms of mass and piston-cylinder effective area. Estimated measurement uncertainty is ± (20 mPa + 3•10-5p). An automated pressure controller is included. Software allows multi-point comparisons with another device to be run unattended. The system has been used to test capacitance diaphragm gauges and other devices in a variety of ranges in both differential and absolute modes. |
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