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Session Topic: 7E, Dimensional Session

   

Paper Title: High Precision Measurement of Length and 2D-Coordinates at the PTB

   

Date & Time: WEDNESDAY, August 7, 2002

 

10:45am - 12:15pm - PARALLEL SESSIONS - SESSION 7

   

Speaker: Harald Bosse PTB

Email: Harald.Bosse@ptb.de

   

We will report on recent developments and current state of art of PTB measurement capabilities on one- and two-dimensional material measures of length like e.g. line scales or photomasks as well as length measuring systems like e.g. laser interferometers or linear encoder systems. The talk will describe the instrumentation developed and used at the PTB to perform high precision length measurements with uncertainties in the nanometer range. For instance the newly developed so-called nanometer comparator which is designed to obtain measurement uncertainties of about 5 nm on 1D-objects with dimensions up to 600 mm will be explained. This comparator utilizes vacuum interferometry for displacement measurements but the calibration object remains under atmospheric conditions. For measurements on 1D as well as 2D measurement objects, like e.g. photomasks, two different mask comparators can also be used, which either operate completely in vacuum or in air. Thus, different comparators with variations of detection systems, environment and type of displacement measurement can be used for systematic investigations in length metrology. These basic investigations on different substrate materials are necessary to further reduce measurement uncertainty for calibration tasks.

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